I fabricated my first run on MEMS devices using MUMPS available
through Cronos.
I got the chip somewhere in June 2002. Basically everything is
ok, except that i have some mirrors slid off and flying all over
the chip. I tested the chip at NUS MEMS lab.
I recorded a 12V pull in voltage for my cantilever beam.
The
cantilever beam under test using microprobe.

Failed mirror flying all over the chip.
|