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Development of a 2X2 Micro Machined Optical Switch

My research summary for IRPA, Malaysia funding for university

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Project Brief

This project aims at designing a 2X2 optical switch based on micro machining (or more popularly known as microelectromechanical system –MEMS) technology and utilizing electrostatic force actuation.
The scope of the project is Design and understand the switch
• To study the electrostatic force actuation
• To develop/refine the designed device models and associated mathematics.
• To understand the mathematics behind simulation software (FEM, BEM, Differential Equations) and performing the simulation.
• To understand Integrated Optic design and fabrication with MEMs technology
• Multi User MEMS Processes (MUMPS) to be used for fabrication

Methodology
The entire development cycle of a MEMS optical switch can be separated into four distinct sub cycles as shown in Figure 1.1 . This research covers the entire design sub cycle and partial of the fabrication sub cycle.


Figure 1.1 : The Development Cycle of the MEMS Optical Switch

Significant Output/Product/Results

In term of knowledge and technical contribution, a model for determining pull-in voltage for a electrostatic actuated MEMS cantilever beam has been developed. This model refines and extends the work of prior researchers and is found to be usable. Through the project, the researchers have gained the technical know how as to how to design a MEMS device. In addition, some novel micro structures has been designed and sent for fabrication. The design is pending for Malaysia pattern application approval. Two papers have been published relating this project.
MEMS has been termed as the next technology to revolutionize the world as integrated circuit (IC) technology did twenty years ago. Renown industrial analyst like Cahners Instat group forecast that MEMS optical swith market alone will rouse to an overwhelming US$700 million in 2003. In the United States of America, more than 100 MEMS related startups has been spin-off, most from university related institutions. In short, MEMS has high potential in commercialization and spin off.
Our group have been communicating with Dr. Francis Tay in National University of Singapore (NUS), who is also actively involved in MEMS research. So far, a visit to Dr. Tay’s lab and related research institution in Singapore has been made.
Due to unavailability of fabrication and testing facility locally, our device is fabricated using commercially available process from US. The device will be tested, in a large portion, in NUS.


Contact Address

Academic Staff Researcher:
Assoc Prof Dr. Abu Bakar Mohammad
Phone: 07 5575005
Email: bakar@suria.fke.utm.my

Assoc. Prof. Dr. Norazan Mohd Kassim
Phone 07 5576160 ext 5105
Email: norazan@suria.fke.utm.my

Postgraduate researcher:
Leow Cheah Wei
Phone: 07 5576160 ext 5102
Email: weiwei2@pd.jaring.my


 

 

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Electrical Engineering Faculty, Universiti Teknologi Malaysia ( FKE, UTM )

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Telematics and Optical Communication Engineering Department (TOP)

 

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Copyright © 2002 - Cheah Wei - Updated 16 Sept 2002

 

   
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