Development of a 2X2
Micro Machined Optical Switch |
My research summary for IRPA, Malaysia funding for university
Project Brief
This project aims at designing a 2X2 optical switch based on micro
machining (or more popularly known as microelectromechanical system
–MEMS) technology and utilizing electrostatic force actuation.
The scope of the project is Design and understand the switch
• To study the electrostatic force actuation
• To develop/refine the designed device models and associated
mathematics.
• To understand the mathematics behind simulation software
(FEM, BEM, Differential Equations) and performing the simulation.
• To understand Integrated Optic design and fabrication with
MEMs technology
• Multi User MEMS Processes (MUMPS) to be used for fabrication
Methodology
The entire development cycle of a MEMS optical switch can be separated
into four distinct sub cycles as shown in Figure 1.1 . This research
covers the entire design sub cycle and partial of the fabrication
sub cycle.

Figure 1.1 : The Development Cycle of the MEMS Optical Switch
Significant Output/Product/Results
In term of knowledge and technical contribution, a model for determining
pull-in voltage for a electrostatic actuated MEMS cantilever beam
has been developed. This model refines and extends the work of prior
researchers and is found to be usable. Through the project, the
researchers have gained the technical know how as to how to design
a MEMS device. In addition, some novel micro structures has been
designed and sent for fabrication. The design is pending for Malaysia
pattern application approval. Two papers have been published relating
this project.
MEMS has been termed as the next technology to revolutionize the
world as integrated circuit (IC) technology did twenty years ago.
Renown industrial analyst like Cahners Instat group forecast that
MEMS optical swith market alone will rouse to an overwhelming US$700
million in 2003. In the United States of America, more than 100
MEMS related startups has been spin-off, most from university related
institutions. In short, MEMS has high potential in commercialization
and spin off.
Our group have been communicating with Dr. Francis Tay in National
University of Singapore (NUS), who is also actively involved in
MEMS research. So far, a visit to Dr. Tay’s lab and related
research institution in Singapore has been made.
Due to unavailability of fabrication and testing facility locally,
our device is fabricated using commercially available process from
US. The device will be tested, in a large portion, in NUS.
Contact Address
Academic Staff Researcher:
Assoc Prof Dr. Abu Bakar Mohammad
Phone: 07 5575005
Email: bakar@suria.fke.utm.my
Assoc. Prof. Dr. Norazan Mohd Kassim
Phone 07 5576160 ext 5105
Email: norazan@suria.fke.utm.my
Postgraduate researcher:
Leow Cheah Wei
Phone: 07 5576160 ext 5102
Email: weiwei2@pd.jaring.my
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